List of speakers as of 5/20/08. Abstracts and Bios' below
Prof. Mildred Dresselhaus(MIT)
Stuart M. Spitzer, Ph. D. Vice President, Engineering, Konarka Technologies Incorporated
Jon Fischer (MIT) Prof. Sylvia Ceyer's group)
Bill Goodhue(Prof. in Physics at UMass Lowell and also staff at Lincoln Labs)
Ihab H. Farag (Professor &UNH Biodiesel Group Director
Chemical Engineering Department)
University of New Hampshire (UNH)
Dr. Jorge Andres DiazProfessor; PhysicsSchoolUniversity of Costa Rica
Bogdan DiaconescuUniv. of New Hampshire
Yan Ge UMass Lowell
Paul TyraVerionix, Incorporated
Mark Grossman Osram Sylvania
Walter P. LapatovichOSRAM SYLVANIA, Central Research and Services Laboratory
Joseph Laski OSRAM SYLVANIA
Xiaopeng Li UMass Lowell Zhiyong Gu (co Author)
Ken Caldwell,Varian Inc
Prof. C. Amato-Wierda UNH
Tentative
AVS/NE Symposium June 2, 2008
Technical Session Speakers
( Peter Somssich / Revised Date: May 14, 2008)
Time Slot
Start Time
Electronic & Catalytic Materials
Session Chair: Prof. Jim Whitten
Energy/ Solar/ Optical
Session Chair: Dr. Joe Baglio/ R.Bilodeau
1
10:00AM
Dr.B. Dianconescu & K.Pohl, UNH
“ Self-Assembly of Molecular Arrays on Strained Metallic Interfaces”
Prof. C. Amato-Wierda “Atmospheric Pressure Plasma CVD of Silicon Nitride Films for Solar Cells “
2
10:30AM
Prof. Mildred Dresselhaus, MIT, “Raman Spectroscopy of Nanotubes and other Nano-Carbon Systems”
3
11:00AM
Continued
4
11:30AM
YanGe & J. Whitten , UMass Lowell
“The Interface between Buckminsterfullerene and Sexithiophene”
Dr. Stuart Spitzer, Konarka Tech.Inc. “Flexible, Thin-Film, Organic Photovoltic Technology-Process and Applications”
12- 1PM
Lunch
Electronic Session Continued
Energy Session Continued
5
1:00 PM
Prof. William Goodhue, UMass Lowell , “Quantum Well, Quantum Dot, and Quantum Cascade Nanomaterials and Devices- Making Electons WorkHard”
Prof. Ihap Farag, UNH
“Biofuels: Promises and Challenges”
6
1:30PM
J. Fisher, J-G Lee & S.Ceyer, MIT
“CO Oxidation on Gold/Nickel (111) Surface Alloys”
Continued
7
2:00PM
X. Liu, T.Baker & Cynthia Friend (Harvard) “Selective Oxidation of Cyclohexene on Gold; Evidence of Oxygen Insertion and Surface-Mediated Tautomerization”
Dr. Walter Lapatovich, Osram Sylvania, “Energy Efficient Lighting: Current Technology and Challenges for the Future”
8
2:30PM
E. Chin, X.Li, F. Gao, S.Mukherjee &
Z. Gu, UMassLowell, “ Synthesis and Characterization of Mulifunctional Nanowires for Sensor and Electronic Applications”
Continued
3- 3:30PM
Coffee Break
Vacuum/ Analytical Technology
Session Chair:Dr. Mars Hablanian
9
3:30PM
Paul Tyra, Verionix Inc.
“Microplasma-based OES sensors and their use in both vacuum and atmospheric manufacturing processes”
Dr. Mark Grossman, Osram Sylvania
“Mercury-Materials Interactions in Fluorescent Lamps”
10
4:00PM
Dr. Jorge Diaz, University of Costa Rica, “Testing of Commercial Mass Spectrometers for NASA Applications and Development of In-Situ Harsh Environment MS Systems”
Joseph Laski, Osram Sylvania “Europium Doped Gallium Nitride Films for Potential Use in a Novel LED Architecture”
11
4:30PM
Continued
Special Session
Session Chair: Dr. Peter Somssich
11
4:30PM
Ken Caldwell, Varian Inc. “IDP-3 Scroll Pump Brings Affordable Dry Vacuum to a Range of Applications”
DEMONSTRATIONS
D1
1:30PM
Richard Sun, Ph.D. Angstrom Sun Technologies Inc.
D2
2:00PM
Dennis Clark, NanoTech Scientific Inc.
2Robertson Rd., WorcesterMA01602
(508)215-6793, dennisc@nanoscientific.com
"Raman Spectroscopy of Nanotubes and other Nano-Carbon Systems"
Mildred Dresselhaus
Massachusetts Institute of Technology
Cambridge, MA 02139
Abstract: Carbon nanostructures have recently assumed new importance with the discovery of an anomalous quantum Hall effect in single layer graphene, which denotes one atomic layer of a bulk graphite crystal. A review is given of early work on the electronic structure of graphene (dating back to 1947), which also denotes the birth of the transistor. A brief review is given of selected carbon nanostructures leading to carbon nanotubes, graphene and graphene ribbons. Particular emphasis is given in this talk to the remarkable properties of carbon nanotubes and graphene and recent advances in the use of photophysics to reveal these unique materials properties.
Biography: Mildred Dresselhaus is an Institute Professor of Electrical Engineering and Physics at MIT.Her research over the years has covered a wide range of topics in Condensed Matter and Materials Physics.She is best known for her work on carbon science and carbon nanostructures.She is also one of the researchers responsible for
the resurgence of the Thermoelectrics research field 15 years ago. She co-chaired a DOE Study on "Basic Research Needs for the Hydrogen Economy in 2003 and more recently co-chaired of a National Academy Decadal Study of Condensed Matter and Materials Physics.She served as Director of the DOE Office of Science toward the end of the Clinton Administration.Professor Dresselhaus is a member of the National
Academy of Sciences, the National Academy of Engineering, and has served as President of the American Physical Society, Treasurer of the National Academy of Sciences, President of the American Association for the Advancement of Science (AAAS), and on numerous advisory committees and councils.Dr.Dresselhaus has received numerous
awards, including the US National Medal of Science and 24 honorary doctorates.Her recent awards include the L'Oreal-UNESCO 2007 North American Laureate for Women in Science, and the 2008 recipient of the Oersted Medal for Physics Education from the American Association for Physics Teachers and of the 2008 Buckley Prize for Condensed Matter Physics from the American Physical Society.
“Flexible, Thin-film, Organic Photovoltaic Technology – Process and Applications”
Stuart M. Spitzer, Ph. D. Vice President, Engineering, Konarka Technologies Incorporated
Dr. Spitzer has over 40 years of Semiconductor Research & Development experience in Microelectronics, 28 of which are in technology management.
He was first employed by NASA, developing hi-reliability microelectronics in support of manned space-flight missions. Thereafter, he worked at Bell Labs as a researcher on III-V semiconductor opto-electronic devices and on the development of CMOS technology. He then started the VLSICenter at ITT, a state-of-the-art, sub-micron design rule, integrated circuit facility, with responsibility for developing the strategic plan linking the VLSICenter’s roadmap with ITT's telecommunication needs.
Dr. Spitzer joined Polaroid with the task of creating the Microelectronics Laboratory, enabling Polaroid’s successful entry into the electronic imaging business by developing solid state lasers, LED’s and CCD image sensors. He joined startup Coatue Corporation as the VP of Engineering, working in the nano-technology area to develop polymer microelectronics. Based on its conductive polymer, non-volatile memory technology, Coatue was acquired by AMD and became part of Spansion, LLC, and Dr. Spitzer headed Spansion’s Boston Research Labs.
Dr. Spitzer currently leads product development of organic and polymeric photovoltaic technology at Konarka, he holds the BS, MS and Ph.D. in Electrical Engineering and Materials Science from MIT, and is the author of numerous technical articles and patents, and has many professional affiliations.
"CO Oxidation on Gold/Nickel (111) Surface Alloys"
Jonathan Fischer, Jae-Gook Lee, Sylvia Ceyer
Dept. of Chemistry, 77 Massachusetts Avenue
Massachusetts Institute of Technology
Cambridge, MA 02139
Abstract: Catalytic oxidation of carbon monoxide from vehicle exhaust is an issue of great environmental and economic importance. Although Gold and Nickel do not form stable bulk alloys at room temperature, a stable surface alloy can be formed by vapor deposition of Gold on a Nickel (111) crystal. Oxygen is observed to molecularly adsorb on surfaces containing approximately 0.3-0.4 ML Au, in contrast to dissociative chemisorbtion on pure Ni(111) and low temperature physisorbtion on pure Au surfaces. This molecularly adsorbed oxygen has been characterized as peroxide and superoxide species by vibrational spectroscopy. These species, as well as loosely bound oxygen atoms produced by thermal decomposition of the oxygen molecules, have been observed to oxidize carbon monoxide to carbon dioxide at temperatures as low as 70 K.
Biography: Jonathan Fischer obtained his B.S. in Chemistry at the University of Massachusetts Lowell. He carried out undergraduate research in the areas of spectroscopy and chemical education. He is presently working on his Ph.D. in Physical Chemistry at the Massachusetts Institute of Technology in the research group of Professor Sylvia Ceyer.
" Mercury-Material Interactions in Fluorescent Lamps"
Mark W. Grossman received his Ph. D. degree in 1975 from the Physic Department, City University of New York, where he investigated the production of runaway electrons in plasma discharges. He spent four years at Brookhaven National Laboratory in the Neutral Beam Development Group, and since then has worked in industry in fields of plasma and lighting science.For the last 25 years he has worked at the OSRAMSylvaniaLightingResearchCenter in Beverley, MA, as team leader for projects in isotope separation, material development, and mercury reduction in fluorescent lamps.
The public is becoming increasingly aware of the need for alternatives to petroleum based fuels. The price of oil is increasing faster than new technologies such as gas-electric hybrids can compensate. Biofuels such as bioethanol, biobutanol and biodiesel are speculated to eventually replace petroleum fuels.
Biodiesel has emerged as an alternative fuel to petrodiesel. It is produced by catalytic esterification of lipids with alcohol. Lipids may include: used cooking oil, soybean, corn, canola, mustard seed, or Jatropha oil. Glycerin is generated as a byproduct. The Biodiesel energy output per unit of fossil energy input is usually around 3.3. This makes Biodiesel a renewable fuel.It can be used in transportation and for electricity generation. Its advantages include increased engine lubricity reducing engine wear, drastically lower emissions relative to diesel, far safer to use and transport, and ease of use in existing diesel engines. Biodiesel has a closed carbon cycle therefore it has no net emission of CO2, a major greenhouse gas. Biodiesel can be used in “neat” form, or blended with diesel in any ratio.
There is an increasing concern about agrofuels versus Biofuels. Agrofuels refer to liquid fuels from monoculture biomass, including trees, grown on a large agroindustrial scale. Agrofuels have resulted in the dilemma of using the land to grow food versus energy crops, with the consequence of increased food prices worldwide.
The basic challenge is how to balance three major issues: food security, feed security, and fuel security. Suggested approaches will be discussed.
Biography:
Dr. Farag is the director and founder of the UNH Biodiesel Group and of the New Hampshire Pollution Prevention Internship Program. In Sept 1976 he joined the faculty at University of New Hampshire (UNH) after receiving his doctorate of Science (Sc.D.) from the Massachusetts Institute of Technology (M.I.T., Cambridge, MA, USA) in Chemical Engineering. He has been active, both nationally and internationally, in Biofuels, Pollution Prevention, Cleaner production, energy efficiency, and chemical risk screening applications.
Dr. Farag has successfully directed many projects, involving research, development, technology transfer, and outreach.He gave many invited briefings to the NH legislators on Pollution Prevention, Biomass, Biodiesel and Bio-Oil. He is currently directing a Project "Biodiesel fuel from Nonedible Vegetable Oils", in Egypt, which focuses on the use of Jatropha to produce Biodiesel, and a project on Sustainable Cities/Clean Water in ASEAN Countries, funded by US-AID. He has collaborated with several countries, e.g., Cambodia, Egypt, El Salvador, Guatemala, Pakistan, Thailand and Vietnam on the use of Jatropha to produce Biodiesel fuel.
Dr. Farag has been the recipient of a number of prestigious awards, the latest are the US EPA Environmental Merit Award, and the US Most Valuable Pollution Prevention (MVP2) Program award. In recognition to his outstanding involvement in International Programs, Dr. Farag was awarded the University of New Hampshire (UNH) award for Excellence in International Engagement. He has also received several Outstanding Teaching awards at MIT and UNH.
"Microplasma-based OES sensors and their use in both vacuum and atmospheric manufacturing processes"
Presented by: Paul Tyra
Vice President of Product Marketing
Verionix, Incorporated (Wilmington, MA)
Abstract:
Recent advances in microplasma technology have made possible palm-sized ICP-OES sensors for the detection of gas composition in electronics, pharmaceutical and solar cell manufacturing processes.With the ability to monitor both trace elements and noble/inert gases within pressure ranges complementary to the normal operating envelopes of traditional RGA and FT-IR technologies, microplasma-based OES sensors provide engineers with new insights into process performance – in real-time, and in-situ.
A summary of recent developments in microplasmas, and in particular, Verionix’ novel ICP and SRR (Split Ring Resonator) plasmas will be presented. How the optical emissions from these microplasmas are used to monitor and control a variety of production-centric applications will also be reviewed. A demonstration of Verionix’ atmospheric-pressure gas composition sensor will be provided.
Biography:
Paul Tyra has 25 years experience in semiconductor, data storage and telecommunications technologies and manufacturing processes. Since starting his career at AT&T Bell Laboratories, he has held variety of senior and executive roles in engineering, product development and marketing at Digital Equipment Corporation, KLA-Tencor (ADE), Helix Technology as well as a number of startup companies.Paul graduated from the University of Michigan and has advanced degrees in both engineering and business from MIT and the MITSloanSchool, where he was a MTS Systems CorporationFellow and an Alfred P. SloanFellow. He is a member of Tau Beta Pi, Pi Tau Sigma and Sigma Xi.
For more information about Verionix, please visit www.Verionix.com
"Europium Doped Gallium Nitride Films for Potential Use in a Novel LED Architecture".
Joseph Laski OSRAM SYLVANIA
Abstract
An alternative approach to tuning the emission color of an LED is described.In contrast to the conventional strategy of modifying the alloy composition of the active layer of an LED structure to achieve varying band gap emission wavelengths, we report on attempts to dope nitride-based semiconductors with rare earth (RE) ions to facilitate internal non-radiative energy transfer from the semiconductor to the RE, resulting in visible RE emission directly from the chip.The presentation focuses on the design and use of a research grade MOVPE (metalorganic vapor-phase epitaxy) reactor to deposit RE doped nitride films, in a process similar to that which is used in commercial LED manufacturing. Results are presented for a europium doped GaN film, representing a first step toward our goal.
Biography:Joseph Laski has worked in the research organizations of OSRAM SYLVANIA and the former GTE Laboratories for the past 21 years.He has a B.S. in Engineering Physics from
LehighUniversity and a M.S. in Physics from NortheasternUniversity.An emphasis on organic materials during his studies has led to an industrial career that has spanned the topics of polymer engineering and organic light emitting diodes, as well as more recent work in the area of inorganic light emitting diodes and other conventional light sources.
"Quantum Well, Quantum Dot, and Quantum Cascade Nanomaterials and Devices – Making Electrons Work Hard"
William D. Goodhue
Dept. of Physics and Photonics Center, University of Massachusetts Lowell
One University Avenue, Lowell, MA 01854
Abstract: Over the past decade quantum well and dot devices have been established as one of the building blocks of modern photonics technology. During this period UMass Lowell has established a significant III-V semiconductor quantum device growth facility in the school’s Photonics Center. This talk will discuss the important role electrons play in resonant tunneling devices and how that role has transitioned to quantum dot devices and terahertz quantum cascade lasers. Quantum dot and terahertz laser work at the Center will be featured.
Biography: Prof. William Goodhue is a Professor of Physics and Applied Physics at the University of Massachusetts Lowell and directs the University'sPhotonics Center. Bill's research interests include quantum-well-device physics (THz in particular), photonic and optoelectronic device fabrication, photonic crystals, metamaterials, MEMS devices, and molecular beam epitaxy.He is also a part time employee of MIT Lincoln Laboratory. His group at UMass Lowell was recognized as part of the Microwave LIMB Sounder Gas Laser Team that recently won a 2005 NASA Public Service Group Achievement Award. His current research projects are focused on poled GaAs and related materials; THz quantum cascade lasers; QD devices, and Sb-based detectors and sources.
"Self-Assembly of Molecular Arrays on Strained Metallic Interfaces"
Bogdan Diaconescu and Karsten Pohl
Department of Physics, University of New Hampshire, Durham, NH
Abstract: Bottom-up synthesis methods suggest a path towards the growth of advanced and designable nano-materials. Central to the success of these methods is the ability to understand and control the film/molecule and the intermolecular interactions, and the dynamics of growth and self-assembly of nano-size structures on an atomic scale. One compelling method to initiate the growth of nano-structured materials is to employ the natural tendency of layered thin films of dissimilar materials to form ordered arrays of misfit dislocation networks. Another avenue is to use the intermolecular interactions to form ordered molecular arrays. We will compare the different self-assembly mechanisms of molecules on strained metallic films of Ag on Ru(0001). We found that, by controlling the molecular coverage and/or the strain in the thin film, various interactions can dominate the growth process, thus resulting in a richness of structures with controllable properties. Ordered triangular arrays of clusters can be grown at low molecular coverage on one monolayer Ag film on Ru(0001). This process is driven by strain relaxation in the metal film. At higher molecular coverage and different Ag film thickness, the intermolecular interactions become dominant and the symmetry and unit cell size of the self-assembled monolayer are consequences of the molecular structure and functionality. Both growth processes are generally applicable to many functionalized C60 molecules, thus opening avenues towards complex and designable self-assembled structures based on a lock-and-key type approach.
Biography: Bogdan Diaconescu currently is a Research Scientist at the Center for High-rate Nanomanufacturing and Department of Physics at the University of New Hampshire. His work explores molecular and stress relaxation driven self-assembly processes yielding to novel nano-materials and the electronic properties of reduced dimensional systems. He is actively involved in instrumentation development required for such investigations. He received a Ph.D. in Physics from the University of New Hampshire and a M.S. in Nuclear Engineering from Bucharest University in Romania. He was the recipient of the 2007 AVS Morton M. Traum surface science division student award and the 2008 Research/Scholarship/Creativity Award from the University of New Hampshire.
"The Interface Between Buckminsterfullerene and Sexithiophene"
Yan Ge and J.E. Whitten
Dept. of Chemistry, 77 Massachusetts Avenue
Massachusetts Institute of Technology
Cambridge, MA 02139
Abstract: Ultraviolet photoelectron spectroscopy (UPS) permits investigation of the valence electronic states of surfaces and interfaces. In this work, it has been used to investigate the interface between thermally deposited a-sexithiophene (6T) and buckminsterfullerene (C60) films deposited on gold surfaces. The nature of the interface is important because blends of these molecules and their derivatives are used for organic photovoltaic devices. Charge transfer from 6T to C60 is evidenced by shifts in the interfacial C60 (6T) highest occupied molecular orbitals toward lower (higher) ionization energies. The absence of vacuum level alignment with an interface dipole of 0.6 eV ± 0.05 eV is observed, independent of the order of deposition. The interface dipole matches the difference in work functions between the C60/Au and 6T/Au surfaces, indicating that the vacuum levels of the organic layers remain pinned to the Fermi level. Energy level diagrams of the interface have been constructed from the UPS data.
Biography: Yan Ge is a graduate student in Polymer Science/Chemistry at the University of Massachusetts Lowell. He is pursuing his Ph.D. under the direction of Professor J.E. Whitten. His Ph.D. research is related to organic-organic interfaces related to organic electronic devices.
"Energy Efficient Lighting: Current Technology and Challenges for the Future"
Walter P. Lapatovich
OSRAM SYLVANIA, Central Research and Services Laboratory,
71 Cherry Hill Drive, Beverly, MA. 01921, U.S.A.
walter.lapatovich@sylvania.com
High intensity discharge (HID) lamps are low temperature, weakly-ionized plasmas sustained in a refractory, light transmissive envelope through dissipation of electric power.Commercial applications require this conversion of electrical power into visible light (380-780nm) to occur with good efficiency and with sufficient spectral content to permit the light to render colors in a fashion comparable to natural sunlight.Modern ceramic metal halide lamps operate in the regime of 100-110 lumens per system watt, with a general color-rendering index of about 85-90. Efficacy improvements are possible, but are bounded by a theoretical limit of approximately 450 lumens per radiated watt for a “white light source” suitable for general illumination.Thermodynamics further limits the approach to this global ceiling to a value of about 230 lumens per system watt- about twice higher than what is realizable today. Factors influencing the lamp design and consequent lamp efficacy and luminance include: lamp size, geometry, arc tube composition, fill chemistry, electrode design and excitation modes.Approaches to answering future challenges- higher lamp efficacy, improved luminance, and mercury-free operation-will be addressed.Comparisons to other energy conserving lighting sources will be given.
Walter P. Lapatovich OSRAM SYLVANIA
Dr. Lapatovich received his S.B. (plasma physics, ’75) and Ph.D. (atomic and molecular physics, ’80) from MIT.He worked at GTE Laboratories on low temperature, molecular, UV emitting plasmas for mercury replacement in fluorescent lamps in the early 80’s.He was involved in a number of government-sponsored projects including fast optical links for downloading GPS data, and chemical modification of plasma conductivity for pulsed power defense applications.Subsequently, he became involved in electrodeless high intensity discharge (EHID) lamps and investigated a number of novel chemistries including metal oxide halides and their fragments.In 1993, with the acquisition of Sylvania by Osram, his work involving microwave excitation broadened to include miniature electrodeless HID lamps for general lighting, automotive, medical and projection applications.Since 1998, he has been involved in HID automotive forward lighting and general lighting ceramic HID lamps.His research is focused on mercury elimination in high luminance sources, understanding the limits of lamp efficacy and high temperature chemical effects in HID lamps.Dr. Lapatovich holds 48 U. S. patents, has produced an assortment of refereed publications and has given numerous invited and contributed presentations in the fields of gaseous electronics and electric discharge lamps.He is a member of the APS, IEEE, ACS and FAST-LS
"Synthesis and Characterization of Multifunctional Nanowires for Sensor and Electronics Applications"
Erica Chin, Xiaopeng Li (presenter),# Fan Gao, Subhadeep S. Mukherjee, and Zhiyong Gu*.
Department of Chemical Engineering and CHN/NCOE Nanomanufacturing Center,
University of Massachusetts Lowell, One University Ave, Lowell, MA 01854
In this presentation we will show our recent results in synthesis and fabrication of one of the most promising nano-building blocks – nanowires (nanorods), and the assembly and integration of nanowires into ordered structures that may find applications in sensors, electronics and related applications. Electrodeposition in nanoporous templates is used to synthesize multifunctional nanowires in the diameter range of 15-200 nm and length up 20 µm. Metallic, polymeric, and hybrid nanowires have been fabricated in very large quantity in this way (109-1010 wires/cm2). Electron microscopes (SEM and TEM) are used to characterize the nanowires fabricated. We will specifically describe two applications with these nanowires: one is to use metallic oxide nanowires as sensors for chemical agent detection (including explosives), and another is for nanoscale lead-free solders for nanoelectronics related applications. Techniques on how to assemble and integrate nanowires into ordered 1-dimensional (1D), 2D and 3D structures will also be discussed. These multifunctional nanowires, combined with novel assembling techniques, may provide new enabling tools and find niche applications in nanotechnology and nanomanufacturing fields.
"Testing of Commercial Mass Spectrometers for NASA Applications and Development of In-Situ Harsh Environment MS Systems”
Speaker:
Dr. Jorge Andres Diaz.
PI. NASA MS Evaluation Project. NTCR;NASA Contractor, KennedySpaceCenter
Dr. C. Richard Arkin. ASRC Aerospace. KennedySpaceCenter
Timothy P. Griffin. NASA.KennedySpaceCenter
Dr. Stacey R. Gillespie. ASRC Aerospace. KennedySpaceCenter
An evaluation of commercially available small mass analyzers and mass spectrometer systems was performed a first step to identify MS candidates for various NASA harsh environment and extreme condition applications.The MS Evaluation Project took place at the Hazard & Gas Detection Lab from KennedySpaceCenter from July 2007 to March 2008, in which vendors with products thatmet a minimum list of requirement including size, weight, mass range,gas species detection, detection limit, accuracy, resolving power, power consumption and software interface were invitedto be part of the evaluation.The commercial MS instruments were evaluated under similar vacuum condition and same gas delivery system parameters. Gas concentration varying from ppm levelsto 100%, flow rates from 250-1000 sccmdepending on the test and constant inletpressure were provided at each one of the 4 test stations set-up for theevaluation. A common set of operations and tests in both nitrogen and helium backgrounds was performed to determine detection limit, accuracy, drift, dynamic range, response time, recovery time and clear out time for each unit.Fourteen MS products were evaluated including products from Extorr, Inficon, Hiden Analytical , Pfiffer, MKS, SRS and VTI.
"Design and Performance of a Small Dry-Scroll Vacuum Pump"
Presented by Ken Caldwell, Product manager, Varian Vacuum, Inc.
Some technical challenges in designing a compact, oil-free vacuum pump with a pumping speed of 60 l/min and a base pressure of less than 0.25 torr are discussed. The new pump provides all the advantages of dry scroll pump technology in a compact, lightweight, cost-effective package, having a hermetic isolation of the pumped gas and utilizing a unique system of producing the required orbiting motion. The pump eliminates hydrocarbon contamination in the vacuum system and external oil leaks into the work environment. The design fully isolates bearings and motor from vacuum space, allowing recovery of precious process gases and preventing leakage of toxic gases. It has a long service interval using a simple tip seal and permitting a quick module exchange.
Kenneth Caldwell is the Product Marketing Manager for dry vacuum pumps at Varian Vacuum Technology. He has worked in the vacuum industry with both Varian, Inc. and Alcatel Vacuum Technology holding various positions in Sales, Marketing, Application Engineering and Product Development. Mr. Caldwell holds a Bachelors of Science degree in Mechanical Engineering from Carnegie-Mellon University.
“Atmospheric Pressure Plasma CVD of Silicon Nitride Films for Solar Cells “
Carmela Amato-Wierda and Shunfu Hu, Materials Science Program, University of New Hampshire, P.S. Raghavan, C.Chartier, Y.P. Wan and C. Khattak, GT Solar Inc.,
Merrimack, New Hampshire
This paper will present our efforts to design and develop an atmospheric pressure plasma chemical vapor deposition technique for producing hydrogenated silicon nitride thin films for solar cell applications.The silicon nitride serves as an anti-reflection and passivation layer, and is currently deposited by various low pressure plasma techniques which are batch-type, require cumbersome vacuum equipment, and limit throughput.A simpler, continuous, fast throughput, non-vacuum deposition process is critical for the solar cell industry to meet upcoming high growth and low cost goals.A large reactor that can handle 4 inch square, multi-crystalline silicon solar cell wafers has been designed and fabricated.Atmospheric pressure plasma is achieved using a dielectric barrier discharge.Preliminary tests have been performed using this reactor, and the system demonstrates a stable and uniform plasma with different gas mixtures, including argon, nitrogen, ammonia and hydrogen and silane.Silicon nitride films are being deposited under various reaction parameters, including frequency, relative flow rates of silane and ammonia, power and gap distance between electrodes.The silicon nitride thin film’s properties will be described based on x-ray photoelectron spectroscopy, scanning electron microscopy, and infrared spectroscopy.
Carmela Amato-Wierda is Associate Professor of Materials Science inthe College of Physical Science and Engineering.She graduated from HarvardUniversity with a B.A. in Chemistry and Physics cum laude, and then obtained her Ph.D. in Chemistry from Rensselaer Polytechnic Institute.Following a postdoctoral fellowship at the National Institute of Standards and Technology, she came to UNH in 1995, and received a National Science Foundation Career Award in 1998.She teaches courses in Materials Science, including a new general education course entitled “The Science of Stuff”.She is the recipient of a grant form the Air Force Office of Sponsored Research along with GT Solar, Inc. for her work on a novel method to deposit coatings on silicon solar cells.Most recently, she has received a grant from the New HampshireInnovationResearchCenter to explore the gas phase chemistry leading to carbon nanotube formation.